XPS Reference Pages
Advanced XPS Analysis of Zinc
Figure 1 and Table 1 summarize reported literature positions for the Zn 2p3/2 peak, presenting mean values as well as their associated standard deviations. Although the Zn 2p3/2 signal is free from complications such as multiplet splitting, chemical analysis remains challenging due to significant signal overlap among different compounds. The situation is further complicated by factors such as natural line widths, variations in peak shapes, and the uncertainties introduced during charge referencing, all of which make reliable chemical‑state interpretation increasingly difficult.
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| Table 3. Summary of experimentally measured Zn L3M4,5M4,5 kinetic energies, modified Auger parameter (α’), as well as their respective standard deviations. [1] |
[1] J.D. Henderson, S.D.C. Buchanan, L.H. Grey, M.C. Biesinger, Appl. Surf. Sci., 730 (2026) 166284.
[2] J. Duchoslav, R. Steinberger, M. Arndt, D. Stifter, Corros. Sci. 82 (2014) 356-361.
Common XPS Questions - Insights from Workshop Participants
1️⃣ Reliable Peak Fitting & Deconvolution
How to perform defensible, physically meaningful peak fitting — avoiding overfitting while properly handling multiplets, satellites, asymmetry, and constraints.
2️⃣ Overlapping Peaks in Complex Systems
Strategies for separating overlapping core levels (e.g., Fe/Co, Ba–Co, Cr/Te, C 1s overlaps) and mixed-phase materials.
3️⃣ Oxidation State Identification
How to confidently distinguish oxidation states (e.g., Fe²⁺/Fe³⁺, Mn multivalency, Ag⁰ vs Ag⁺) and interpret satellite structures.
4️⃣ Quantitative Accuracy
How to correctly calculate atomic percentages, apply RSFs, account for transmission functions, and interpret stoichiometry mismatches.
5️⃣ Energy Referencing & Carbon Correction
Reliability of C 1s calibration, handling adventitious carbon, alternatives to carbon referencing, and the impact of improper calibration.
6️⃣ Background Selection & Fitting Parameters
Correct choice of inelastic background (Shirley vs Tougaard), FWHM constraints, peak shapes, spin–orbit rules, and acceptable χ² values.
7️⃣ Charging Effects (Especially Insulators & Operando Work)
How to detect, correct, and minimize charging in powders, polymers, biological materials, and electrochemical systems.
8️⃣ Oxygen Peak Interpretation
Deconvoluting O 1s spectra in mixed oxides, identifying oxygen vacancies, and resolving oxygen contributions in multi-metal systems.
9️⃣ Publication Standards & Reviewer Expectations
How many components are acceptable? Is peak fitting mandatory? What are common reviewer criticisms? How should survey and HR spectra be presented?
🔟 Surface Sensitivity & Depth Information
Understanding probing depth, interaction volume, oxide thickness estimation, surface vs subsurface contributions, and when XPS truly represents “surface-only” chemistry.
Magnesium 2p and Auger Parameter Values
Magnesium 2p binding energy and modified Auger parameter values are shown in Table 1. It is worth noting that accounting for the difference between charge referencing procedures is vital for correct analysis of magnesium compounds (especially for MgO and Mg(OH)2) [1]. For MgO, the peak position for the Mg 2p transition is 49.4 eV when charge referenced to adventitious carbon at 284.8 eV, and 50.8 when referenced to the Mg 2p metal peak at 49.73 eV (or grounded). This has led to a lot of confusion regarding the Mg 2p peak positions to use for analysis. The results from a consistently analyzed dataset are shown in Table 1 together with compiled literature values [1]. Since the chemical sensitivity of the Mg 2p transition is low for magnesium the Auger parameter and anion signals are particularly important to consider for improved speciation.
The anion fitting parameters—binding energy, peak width, and line shape—obtained from fitting reference samples are reported in Table 2 from a consistently analyzed data set [1]. The O 1s signal can be used to separate MgO and Mg(OH)2 despite their overlapping Mg 2p signals. The O 1s peak position of Mg(OH)2 is +1.6 eV with respect to the main lattice peak of MgO. However, the peak position for Mg(OH)2 can overlap with other environments such as the MgO defective oxide and adventitious carbon, which may need to be accounted for in the analysis.
Magnesium Induced Ghost Peaks
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| Figure 1. Survey spectrum of Mg(OH)2 powder where the O 1s ghost peak is clearly visible at 765.7 eV. The figure is reproduced from reference [1]. |
XPS Detection Limits
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| XPS detection limits using Al K(alpha) radiation [1]. |
[1] A.G. Shard, Surf. Interface Anal. 46 (2014) 175-185.
Carbon 1s for Organic Compounds
The seminal work of Graham Beamson and Dave Briggs in their "High Resolution XPS of Organic Polymers – The Scienta ESCA300 Database" has been utilized since 1992 as an invaluable resource for the XPS analysis of polymers and organic materials. A summary of carbon 1s binding energies for organic functional groups from this work are presented here. The original work calibrates the binding energy scale to 285.0 eV for aliphatic carbon C 1s. The values presented here are now calibrated to 284.8 eV for aliphatic carbon, in line with recent results [2].
Figure 1. Summary of the mean, maximum, and minimum carbon 1s binding energies for different organic functionalities according to the work of Beamson and Briggs [1]. Binding energy calibration presented here have been adjusted to the main aliphatic C 1s peak at 284.8 eV.Table 1. Summary of the mean, maximum, and minimum carbon 1s binding energies for different organic functionalities according to the work of Beamson and Briggs [1]. Binding energy calibration presented here have been adjusted to the main aliphatic C 1s peak at 284.8 eV.
The effects of various functional groups on beta carbon binding energies can be significant (Table 2). Note that, in this context, the alpha carbon is the carbon directly attached to the functional group, and the beta carbon is attached to the alpha carbon. These effects have been included in the refinement of the binding energy value for the aliphatic carbon component in adventitious carbon [2].
[1] G. Beamson, D. Briggs, High Resolution XPS of Organic Polymers - The Scienta ESCA300 Database, Wiley Interscience, 1992, Appendices 1 and 2.
[2] L.H. Grey, H.-Y. Nie, M.C. Biesinger, Appl. Surf. Sci. 653 (2024) 159319.
Oxygen 1s for Organic Compounds
Additional Notes:
C-OH (aliphatic) Ref to C 1s at 284.8 eV: Average 532.7 eV, Min. 532.5 eV, Max. 532.9 eV
C-OH (aromatic) Ref to C 1s at 285.0 eV: 533.6 eV
Also note that Si 2p3/2 for PDMS (silicone) is at 101.79 eV (Si 2p = 102.0 eV) with the C 1s at 284.38 eV and O 1s at 532.00 eV (referenced to aliphatic C at 285.0 eV). If we shift the C 1s to 285.0 eV then Si 2p3/2 is at 102.41 eV (Si 2p = 102.6 eV) and O 1s is at 532.62 eV for silicone. If we then shift the C 1s to 284.8 eV then Si 2p3/2 is at 102.21 eV (Si 2p = 102.4 eV) and O 1s is at 532.42 eV for silicone.
References:
[1] G. Beamson, D. Briggs, High Resolution XPS of Organic Polymers - The Scienta ESCA300 Database, Wiley Interscience, 1992, Appendices 3.1 and 3.2.
Calculating Oxygen Content from Adventitious Carbon 1s Spectra
(Note: you must download the file to Excel to use it - it is locked in Google Docs).
Advanced Analysis of Indium
Analysing indium and indium-based compounds using X-ray Photoelectron Spectroscopy is challenging due to only slight shifts in the binding energies of the commonly used In 3d5/2 core line. A recent paper shares a comprehensive set of reference data for indium and its compounds, covering the In 3d, 3p, and 4d core lines, the In MNN Auger signal, as well as relevant counter ion signals [1]. Valuable tools, such as the modified Auger parameter and chemical state (Wagner) plots, which aid in differentiating indium species are also discussed.
Figure 1 and Table 1 present average literature values for the In 3d5/2 core line, highlighting both the average and standard deviations. These values illustrate the apparent challenge in distinguishing between various indium compounds. Factors like natural line widths, line shapes, and potential errors in charge correction add further complexity to accurate speciation.
| Figure 1. Average In 3d5/2 literature values for indium compounds. |
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| Table 1. Average In 3d5/2 literature values for indium compounds. |
| Figure 2 In 3d spectra from [1]. |
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| Table 2. Experimental In 3d5/2 values from [1]. |
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| Table 3. In M4N4,5N4,5 and modified Auger parameter values [1]. |
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| Table 4. In MNN Auger peak fitting parameters [1]. |
Iron
Grosvenor et al.[3] fitted the various iron oxide, hydroxide and halide peak shapes with a close approximation of the Gupta and Sen[4] multiplet structure. Multiplet FWHM, splittings and weightings are presented. An analysis of satellite to main peak separation is also given. All Fe(II) (high spin only as low spin Fe(II) does not exhibit multiplet splitting) and Fe(III) species can be fitted with Gupta and Sen multiplet structure. Variation in peak spacing and intensity occur for different ligands. Broad satellite peaks of varying intensities at binding energies above the main Fe 2p3/2 structure are present in the spectra for all high spin compounds. However paper [3] only presents the main multiplet lines, excluding the details needed to fit the broader higher binding energy satellite structures.
Table 1 [5] presents full fitting parameters including the multiplet and satellite structure. FWHM values are reported for 10 eV pass energy only. To accommodate lower resolution settings slightly broader peaks would be necessary for best fit values. For these fits a Shirley background encompassing only the 2p3/2 portion of the spectrum is used. Also included in this Table are new spectral fitting parameters for FeCr2O4 and NiFe2O4, species that are important for the examination of oxide films on Fe-Cr-Ni alloys, as well as data for new analyses of α-Fe2O3 and γ-Fe2O3[5]. Fitting parameters for FeCO3, which has been noted in certain corrosion products, are also presented in Table 1. These analyses were collected from a mineral sample of siderite (cleaved in vacuum). Carbon 1s binding energy for FeCO3 is at 290.1 eV. The many spectra are best viewed in the original papers - see links in reference section.
Table 1. Fe 2p3/2 spectral fitting parameters: binding energy (eV), percentage of total area, FWHM value (eV) and spectral component separation (eV) [5,6].
While these values [5] and reference spectra [1,3,5] will be useful for identification of pure oxide or oxy-hydroxide species, curve fitting of mixed systems quickly becomes complicated due to spectral overlaps. For example, it can be seen that various Fe(III) compounds have a similar range of Fe 2p binding energies and vary mostly in peak shape and satellite intensities. Any attempt at fitting two or more Fe(III) species to a spectrum will consequently contain an inherent degree of error. As well, overlap of the Fe(III) satellite structure with the Fe(0) and Fe(II) Fe 2p1/2 portion of the spectrum will result in setting the higher binding energy background endpoint placement at a point that will not cover the satellite structure of the Fe(III) species. This will require any fitting of mixed chemical state systems containing Fe(III) species to omit the higher binding energy Fe(III) satellite (e.g. Fe2O3, FeOOH) from the envelope of peaks. This will again increase the error associated with the curve fitting. Finally, determination of the Fe species present, especially in a mix of Fe(III) species, should include corroborating evidence from O 1s analysis and even other analytical techniques such as Raman spectroscopy or, for thin crystalline films, grazing angle XRD. Some examples of fittings in mixed species samples are presented in [5].
Compared to the other transition metal species, the complex multiple species fitting of Fe is the most problematic. With so many possible species having overlapping binding energies erroneous interpretation can result. A sample with two distinct species can likely be fitted accurately, three species much less so, while four or more species must be looked at as indicative but unreliable.
[1] N.S. McIntyre, D.G. Zetaruk, Anal. Chem. 49 (1977) 1521.
[3] A.P. Grosvenor, B.A. Kobe, M.C. Biesinger, N.S. McIntyre, Surf. Interface Anal. 36 (2004) 1564.
[4] R.P. Gupta, S.K. Sen, Phys Rev. B 12 (1975) 15.
[5] M.C. Biesinger, B.P. Payne, A.P. Grosvenor, L.W.M. Lau, A.R. Gerson, R.St.C. Smart, Appl. Surf. Sci. 257 (2011) 2717.
Workshop Exercises: Advanced Chemical State Analysis
2) Use it to charge correct a series of spectra. Download test file.
3) Oxygen 1s - General fitting of the O 1s spectra for metals. Use file from number 2. Fit the O 1s spectrum, understand and explain all sources of oxygen.
5) Cr 2p - Set up curve-fitting parameters. Download Cr 2p test file. See chromium literature fitting values.
Notes:
•Cr(VI) Species – mix of oxide and hydrated species
-One narrow peak FWHM 1.5 eV
-Range from 579.0 to 580.0 eV
•Cr(III) Species – mix of oxide and hydrated species
-Cr(OH)3 - One broad peak FWHM of ~2.5 eV, set to 577.5 eV
-Cr2O3 - Five multiplet peaks of equal FWHM (~0.9 eV) with set areas and separations based on standard sample
•Cr(0) – Metal
-One asymmetric peak with a FWHM of 0.9 eV
-Range from 573.9 to 574.5 eV
6) Ni 2p - For the brave, download and give it a try. See Ni 2p literature fitting values and general instructions here.
What is Adventitious Carbon?
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| Figure 1. Average of 80 adventitious carbon C 1s XPS spectra. |
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| Table 1. Average adventitious carbon C 1s fitting parameters from an average of 80 AdC spectra. |
[3] D.J. Miller, M.C. Biesinger, N.S. McIntyre, Surf. Interface Anal. 33 (2002) 299.
[4] H. Piao, N.S. McIntyre, Surf. Interface Anal. 33 (2002) 591.
Using Adventitious Carbon for Charge Correcting
The C 1s spectrum for adventitious carbon can be fit as follows. A single peak, ascribed to alkyl type carbon (C-C, C-H), is fit to the main peak of the C 1s spectrum. A second peak is added that is constrained to be 1.5 eV above the main peak, of equal FWHM to the main peak (C-C, C-H). This higher binding energy peak is ascribed to alcohol and/or ester functionality (C-OH, C-O-C). Further high binding energy components can be added if required. For example: C=O at approximately 3 eV above the main peak and O-C=O at 3.8 to 4.3 eV above the main peak. One or both of these peaks may also have to be constrained to the FWHM of the main peak if they are poorly resolved. Reference [1] and the table below outline standard starting fitting parameters for adventitious carbon.
For organic systems, especially polymers, it is convenient to charge correct to the C-C, C-H signal set to 285.0 eV. This makes for easier comparison to the polymer handbook [7] which uses this number for charge correction.
References:
[1] M.C. Biesinger, Appl. Surf. Sci, 597 (2022) 153681.
[3] P. Swift, Surf. Interface Anal. 4 (1982) 47.
[4] D.J. Miller, M.C. Biesinger, N.S. McIntyre, Surf. Interface Anal. 33 (2002) 299.
[5] M.C. Biesinger, unpublished results
[7] G. Beamson, D. Briggs, High Resolution XPS of Organic Polymers - The Scienta ESCA300 Database Wiley Interscience, 1992.
Graphitic/Graphene/Carbon Nanotube C 1s Curve-Fitting
Materials of a graphitic nature (e.g., graphite, graphene, carbon nanotubes etc.) will have a C 1s main peak, attributed to C=C, which can be used as a charge reference set to 284.5 eV. An average of values for graphite from 21 references from the NIST database [1] is 284.46 eV with a standard deviation of 0.14 eV. Note that the well characterized value of 284.5 eV for graphitic carbon is also a strong indicator that this value is not appropriate as a value to use for AdC charge referencing. While these types of samples are generally conductive and if they can be mounted in a manor (in electrical contact with the sample stage) to take advantage of this one should do so. However, many of these types of samples come as a small volume of powders or flakes which are very difficult to mount. Usually, we mount these on a double-sided adhesive which works well but electrically isolates the sample. Oxidation of these types of samples (e.g., graphene oxide) or their functionalization (e.g., functionalized CNTs) can result in them behaving less conductively or as a mixed conductive/insulating material. Samples where these materials are mixed with other conducting or insulating compounds can also result in a mixed conductive/insulating sample. For most of these types of samples we now electrically isolate the sample and charge reference to C 1s at 284.5 eV for the graphitic (C=C) peak.[2]
Table 1 from [2] presents general fitting parameters for graphitic, graphene and carbon nanotube type materials. These starting fitting parameters include the main peak asymmetry (defined using an asymmetric Lorentzian (LA) line shape) and π to π* shake-up satellite from a pure graphite standard sample. These fitting parameters are similar to the approach taken by Morgan (Fig. 5, Table 2) [3], Moeini et al. (Table 1) [4], and Gengenbach et al.[5] It is always best to run your own standard (pure graphite, graphene, CNT etc.) to get fitting parameters appropriate for your sample type, instrument and conditions used. Slight differences in the main peak asymmetry and differing shake-up satellite position, shape and intensities are possible for differing classes of graphitic materials. See for example from Morgan[3] where HOPG and nano-onion C 1s spectra show peak-shape differences, likely due to hydrogenation of the sample. However, with this caveat stated, the parameters used based on a graphite standard have worked very well for variety of samples (134) analyzed in the five-year data survey from [2]. Figure 1(A) presents the standard graphite spectrum used to obtain the parameters presented in Table 1. The spectra from Figure 1(B, C and D) show the use of these fitting parameters from Table 1 to effectively model a variety of graphitic component containing materials.
References:
[1] C.D. Wagner, A.V. Naumkin, A. Kraut-Vass, J.W. Allison, C.J. Powell, J.R.Jr. Rumble, NIST Standard Reference Database 20, Version 3.4 (web version) (http:/srdata.nist.gov/xps/) 2003.
[2] M.C. Biesinger, Appl. Surf. Sci. 597 (2022) 153681.
[3] D.J. Morgan, J. Carbon. Res. 7 (2021) 51.
[4] B. Moeini, M.R. Linford, N. Fairley, A. Barlow, P. Cumpson, D. Morgan, V. Fernandez, J. Baltrusaitis. Surf. Interface Anal. 54 (2022) 67.
[5] T.R. Gengenbach, G.H. Major, M.R. Linford, C.D. Easton, J. Vac. Sci. Technol. A, 39 (2021) 013204.
Systematic and Collaborative Approach to Problem Solving using X-ray Photoelectron Spectroscopy
Our recent article [1] in Applied Surface Science Advances highlights methodology developed as a result of years of interactions between many junior and senior X-ray Photoelectron Spectroscopy (XPS) users operating within the CasaXPS spectral processing and interpretation program framework. In particular, discussions arising from a series of workshops have been a significant source for developing the overall XPS data processing concept and are the motivation for creating this work. These workshops organized by the Institut des Matériaux Jean Rouxel (IMN), Nantes gather both experienced and novice users of XPS for a week of discourse in conceptual experiment design and the resulting data processing. However, the framework constructed and utilized within these workshops encouraged the dissemination of knowledge beyond XPS data analysis and emphasized the importance of a multi-disciplinary collaborative approach to surface analysis problem-solving. The material presented here embodies data treatment originating from data made available to the first CNRS Thematic Workshop presented at Roscoff 2013. The methodology described here has evolved over the subsequent workshops in 2016 and 2019 and currently represents the philosophy used in CasaXPS spectral data processing paradigm.
This article also serves as a useful reference descriptor of the CasaXPS software program.
Reference:
Workshop Exercises: The Auger Parameter and Wagner Plots
1. Try calculating the Auger parameter for ZnO and Cd metal (click on links to download the spectra). (Compare to zinc and cadmium literature.)
2. Calculate the Auger parameter and use it to determine the chemical state for 3 unknown Cu species (Unknown 1, Unknown 2, Unknown 3). Click here to access Cu binding energy and Auger parameter values.
Wagner Plots
Handouts will be given or you can download the exercise here.
Use lines of slope 1 and 3 to look at the trends:
1) For the Ga(III) halogen series.
2) Going from Ga(III), Ga(II) to Ga(I).
3) For the metal, alloys and semiconductors (Ga2O3 is also a semiconductor).
Do final state effects dominate (slope of 3) or do initial state effects dominate (slope of 1)?
Workshop Exercises: Survey Scans
2) Download exercise 2 file. See link to quantification from survey scans.




























