The Use and Misuse of Curve Fitting in the Analysis of Core X-ray Photoelectron Spectroscopic Data

Peter Sherwood at the University of Washington has recently published a very good review article [1] that goes through many of the issues and pitfalls associated with achieving meaningful results from curve fitting XPS spectra.  It also includes a useful tutorial section that uses the W 4f spectrum of oxidized tungsten to illustrate the methods outlined in the paper.  A good starting point read for those who are getting into curve-fitting of XPS spectra (and for those needing a refresher!). 

Reference:
[1] Peter M.A. Sherwood, The use and misuse of curve fitting in the analysis of core X‐ray photoelectron spectroscopic data, Surf. Interface Anal. (2019).
https://doi.org/10.1002/sia.6629