Ti 2p3/2 = 455.5 eV +/-0.4 eV
N 1s = 397.1 +/-0.3 eV
The Ti 2p peak for the nitride appears to have an asymmetric peak shape and can, in lower resolution work, be fit similar to the metal.
Recent, excellent, high resolution work by Jaeger and Patscheider [2] shows that the asymmetry is comprised of several shake-ups and plasmons. Bulk and surface plasmons for the Ti 2s peak and N 1s peak are also found in this paper.
Table 1. Titanium nitride binding energies (eV), assignments and FWHM from [2]. Reproduced with permission from Elsevier Limited, Oxford, UK.
Figure 1. Ti 2p peak for titanium nitride from [2]. Reproduced with permission from Elsevier Limited, Oxford, UK.
An excellent account of the species present (Ti and N) in an air exposed film of titanium nitride is presented in reference [3].
References:
[1] C.D. Wagner, A.V. Naumkin, A. Kraut-Vass, J.W. Allison, C.J. Powell, J.R.Jr. Rumble, NIST Standard Reference Database 20, Version 3.4 (web version) (http:/srdata.nist.gov/xps/) 2003.
[2] D. Jaeger, J. Patscheider, J. Electron Spectrosc. Relat. Phenom. 185 (2012) 523-534.
[3] N.C. Saha, H.G. Tompkins, J. Appl. Phys. 72 (1992) 1.
