Analyzing TOF-SIMS Spectra in CasaXPS

Researchers at Surface Science Western have been employing the powerful curve-fitting procedures available in CasaXPS to help analyze TOF-SIMS spectra obtained on our Ion-TOF IV time-of-flight secondary ion mass spectrometer. The curve-fitting procedures are useful to help deconvolute overlapping peaks (masses) and comparing peak areas between samples. A procedure for importing and analyzing ToF-SIMS data into CasaXPS has been developed and can be downloaded here.