Aluminum oxides and hydroxides (Al2O3, Al(OH)3 and AlOOH) are extremely difficult to differentiate by XPS. A compilation of Al 2p3/2 values and modified Auger parameter values (Al 2p - KL23L23(1D)) are presented below. Unfortunately, statistical speaking, the values for the varying oxides and hydroxides overlap each other.
Table 1. Al 2p3/2 binding energy values [1].

Table 2. Al 2p-KL23L23(1D) modified Auger Parameter values [1].

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